High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry
According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the r...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2021-01-01
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| Series: | International Journal of Optics |
| Online Access: | http://dx.doi.org/10.1155/2021/6937072 |
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| author | Donge Zhao Chaozheng Jia Yayun Ma Xuefeng Yang Bin Zhang Wenbo Chu |
| author_facet | Donge Zhao Chaozheng Jia Yayun Ma Xuefeng Yang Bin Zhang Wenbo Chu |
| author_sort | Donge Zhao |
| collection | DOAJ |
| description | According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified. |
| format | Article |
| id | doaj-art-37f519a6af4a42668f58841de3d43212 |
| institution | Kabale University |
| issn | 1687-9384 1687-9392 |
| language | English |
| publishDate | 2021-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Optics |
| spelling | doaj-art-37f519a6af4a42668f58841de3d432122025-02-03T01:25:14ZengWileyInternational Journal of Optics1687-93841687-93922021-01-01202110.1155/2021/69370726937072High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting InterferometryDonge Zhao0Chaozheng Jia1Yayun Ma2Xuefeng Yang3Bin Zhang4Wenbo Chu5School of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaSchool of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaSchool of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaSchool of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaSchool of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaSchool of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaAccording to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified.http://dx.doi.org/10.1155/2021/6937072 |
| spellingShingle | Donge Zhao Chaozheng Jia Yayun Ma Xuefeng Yang Bin Zhang Wenbo Chu High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry International Journal of Optics |
| title | High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry |
| title_full | High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry |
| title_fullStr | High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry |
| title_full_unstemmed | High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry |
| title_short | High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry |
| title_sort | high accuracy surface profile measurement based on the vortex phase shifting interferometry |
| url | http://dx.doi.org/10.1155/2021/6937072 |
| work_keys_str_mv | AT dongezhao highaccuracysurfaceprofilemeasurementbasedonthevortexphaseshiftinginterferometry AT chaozhengjia highaccuracysurfaceprofilemeasurementbasedonthevortexphaseshiftinginterferometry AT yayunma highaccuracysurfaceprofilemeasurementbasedonthevortexphaseshiftinginterferometry AT xuefengyang highaccuracysurfaceprofilemeasurementbasedonthevortexphaseshiftinginterferometry AT binzhang highaccuracysurfaceprofilemeasurementbasedonthevortexphaseshiftinginterferometry AT wenbochu highaccuracysurfaceprofilemeasurementbasedonthevortexphaseshiftinginterferometry |