Proton beam writing: World experience and prospectives in Ukraine
Proton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Nume...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute for Nuclear Research, National Academy of Sciences of Ukraine
2023-03-01
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| Series: | Ядерна фізика та енергетика |
| Subjects: | |
| Online Access: | http://jnpae.kinr.kiev.ua/24.1/Articles_PDF/jnpae-2023-24-0072-Polozhii.pdf |
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