Elements of solid state electronics based on soi-structures and si whiskers for cryogenic temperatures

The paper presents the study results of electrical properties of polycrystalline silicon films in silicon-on-insulator structures and Si whiskers in the temperature range of 4.2 – 70 K obtained by impedance measurements in the frequency range from 10 Hz to 250 kHz and the possibility of their use in...

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Bibliographic Details
Main Authors: A. A. Druzhinin, I. P. Osrovskkii, Yu. M. Khoverko, R. N. Koretskyy
Format: Article
Language:English
Published: Politehperiodika 2014-12-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:https://tkea.com.ua/index.php/journal/article/view/302
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