Numerical Analysis of Sensitivity of SAW Structure to the Effect of Toxic Gases
The paper presents the results of numerical analysis of the SAW gas sensor in the steady and non-steady states. The effect of SAW velocity changes vs surface electrical conductivity of the sensing layer is predicted. The conductivity of the porous sensing layer above the piezoelectric waveguide depe...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Fundamental Technological Research Polish Academy of Sciences
2016-09-01
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| Series: | Archives of Acoustics |
| Subjects: | |
| Online Access: | https://acoustics.ippt.pan.pl/index.php/aa/article/view/1771 |
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