Simulation of Proton Beam Effects in Thin Insulating Films
Effects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ult...
Saved in:
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Wiley
2013-01-01
|
Series: | International Journal of Photoenergy |
Online Access: | http://dx.doi.org/10.1155/2013/128410 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
_version_ | 1832563760918691840 |
---|---|
author | Ljubinko Timotijevic Irfan Fetahovic Djordje Lazarevic Milos Vujisic |
author_facet | Ljubinko Timotijevic Irfan Fetahovic Djordje Lazarevic Milos Vujisic |
author_sort | Ljubinko Timotijevic |
collection | DOAJ |
description | Effects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ultrathin layers of these materials has been modeled by Monte Carlo simulations of particle transport. Parameters that have been varied in simulations include proton energy and insulating layer thickness. Materials are compared according to both ionizing and nonionizing effects produced by the passage of protons. |
format | Article |
id | doaj-art-3217b37dac894c11800a47f866ff44ad |
institution | Kabale University |
issn | 1110-662X 1687-529X |
language | English |
publishDate | 2013-01-01 |
publisher | Wiley |
record_format | Article |
series | International Journal of Photoenergy |
spelling | doaj-art-3217b37dac894c11800a47f866ff44ad2025-02-03T01:12:30ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2013-01-01201310.1155/2013/128410128410Simulation of Proton Beam Effects in Thin Insulating FilmsLjubinko Timotijevic0Irfan Fetahovic1Djordje Lazarevic2Milos Vujisic3Faculty of Electrical Engineering, University of Belgrade, 11060 Belgrade, SerbiaState University of Novi Pazar, 36300 Novi Pazar, SerbiaInstitute of Nuclear Sciences “Vinca”, 11000 Belgrade, SerbiaFaculty of Electrical Engineering, University of Belgrade, 11060 Belgrade, SerbiaEffects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ultrathin layers of these materials has been modeled by Monte Carlo simulations of particle transport. Parameters that have been varied in simulations include proton energy and insulating layer thickness. Materials are compared according to both ionizing and nonionizing effects produced by the passage of protons.http://dx.doi.org/10.1155/2013/128410 |
spellingShingle | Ljubinko Timotijevic Irfan Fetahovic Djordje Lazarevic Milos Vujisic Simulation of Proton Beam Effects in Thin Insulating Films International Journal of Photoenergy |
title | Simulation of Proton Beam Effects in Thin Insulating Films |
title_full | Simulation of Proton Beam Effects in Thin Insulating Films |
title_fullStr | Simulation of Proton Beam Effects in Thin Insulating Films |
title_full_unstemmed | Simulation of Proton Beam Effects in Thin Insulating Films |
title_short | Simulation of Proton Beam Effects in Thin Insulating Films |
title_sort | simulation of proton beam effects in thin insulating films |
url | http://dx.doi.org/10.1155/2013/128410 |
work_keys_str_mv | AT ljubinkotimotijevic simulationofprotonbeameffectsinthininsulatingfilms AT irfanfetahovic simulationofprotonbeameffectsinthininsulatingfilms AT djordjelazarevic simulationofprotonbeameffectsinthininsulatingfilms AT milosvujisic simulationofprotonbeameffectsinthininsulatingfilms |