Simulation of Proton Beam Effects in Thin Insulating Films

Effects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ult...

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Main Authors: Ljubinko Timotijevic, Irfan Fetahovic, Djordje Lazarevic, Milos Vujisic
Format: Article
Language:English
Published: Wiley 2013-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2013/128410
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author Ljubinko Timotijevic
Irfan Fetahovic
Djordje Lazarevic
Milos Vujisic
author_facet Ljubinko Timotijevic
Irfan Fetahovic
Djordje Lazarevic
Milos Vujisic
author_sort Ljubinko Timotijevic
collection DOAJ
description Effects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ultrathin layers of these materials has been modeled by Monte Carlo simulations of particle transport. Parameters that have been varied in simulations include proton energy and insulating layer thickness. Materials are compared according to both ionizing and nonionizing effects produced by the passage of protons.
format Article
id doaj-art-3217b37dac894c11800a47f866ff44ad
institution Kabale University
issn 1110-662X
1687-529X
language English
publishDate 2013-01-01
publisher Wiley
record_format Article
series International Journal of Photoenergy
spelling doaj-art-3217b37dac894c11800a47f866ff44ad2025-02-03T01:12:30ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2013-01-01201310.1155/2013/128410128410Simulation of Proton Beam Effects in Thin Insulating FilmsLjubinko Timotijevic0Irfan Fetahovic1Djordje Lazarevic2Milos Vujisic3Faculty of Electrical Engineering, University of Belgrade, 11060 Belgrade, SerbiaState University of Novi Pazar, 36300 Novi Pazar, SerbiaInstitute of Nuclear Sciences “Vinca”, 11000 Belgrade, SerbiaFaculty of Electrical Engineering, University of Belgrade, 11060 Belgrade, SerbiaEffects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ultrathin layers of these materials has been modeled by Monte Carlo simulations of particle transport. Parameters that have been varied in simulations include proton energy and insulating layer thickness. Materials are compared according to both ionizing and nonionizing effects produced by the passage of protons.http://dx.doi.org/10.1155/2013/128410
spellingShingle Ljubinko Timotijevic
Irfan Fetahovic
Djordje Lazarevic
Milos Vujisic
Simulation of Proton Beam Effects in Thin Insulating Films
International Journal of Photoenergy
title Simulation of Proton Beam Effects in Thin Insulating Films
title_full Simulation of Proton Beam Effects in Thin Insulating Films
title_fullStr Simulation of Proton Beam Effects in Thin Insulating Films
title_full_unstemmed Simulation of Proton Beam Effects in Thin Insulating Films
title_short Simulation of Proton Beam Effects in Thin Insulating Films
title_sort simulation of proton beam effects in thin insulating films
url http://dx.doi.org/10.1155/2013/128410
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AT irfanfetahovic simulationofprotonbeameffectsinthininsulatingfilms
AT djordjelazarevic simulationofprotonbeameffectsinthininsulatingfilms
AT milosvujisic simulationofprotonbeameffectsinthininsulatingfilms