APA (7th ed.) Citation

Ugray, L. D. The Problems of Selecting a Proper Microlithographic Imaging System. Wiley.

Chicago Style (17th ed.) Citation

Ugray, L. D. The Problems of Selecting a Proper Microlithographic Imaging System. Wiley.

MLA (9th ed.) Citation

Ugray, L. D. The Problems of Selecting a Proper Microlithographic Imaging System. Wiley.

Warning: These citations may not always be 100% accurate.