Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation

We studied the photoluminescence (PL) of Si nanocrystals (Si-NCs) embedded in SiO2 obtained by ion implantation at MeV energy. The Si-NCs are formed at high depth (1-2 μm) inside the SiO2 achieving a robust and better protected system. After metal ion implantation (Ag or Au), and a subsequent therma...

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Main Authors: Jhovani Bornacelli, Jorge Alejandro Reyes Esqueda, Luis Rodríguez Fernández, Alicia Oliver
Format: Article
Language:English
Published: Wiley 2013-01-01
Series:Journal of Nanotechnology
Online Access:http://dx.doi.org/10.1155/2013/736478
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author Jhovani Bornacelli
Jorge Alejandro Reyes Esqueda
Luis Rodríguez Fernández
Alicia Oliver
author_facet Jhovani Bornacelli
Jorge Alejandro Reyes Esqueda
Luis Rodríguez Fernández
Alicia Oliver
author_sort Jhovani Bornacelli
collection DOAJ
description We studied the photoluminescence (PL) of Si nanocrystals (Si-NCs) embedded in SiO2 obtained by ion implantation at MeV energy. The Si-NCs are formed at high depth (1-2 μm) inside the SiO2 achieving a robust and better protected system. After metal ion implantation (Ag or Au), and a subsequent thermal annealing at 600°C under hydrogen-containing atmosphere, the PL signal exhibits a noticeable increase. The ion metal implantation was done at energies such that its distribution inside the silica does not overlap with the previously implanted Si ion . Under proper annealing Ag or Au nanoparticles (NPs) could be nucleated, and the PL signal from Si-NCs could increase due to plasmonic interactions. However, the ion-metal-implantation-induced damage can enhance the amount of hydrogen, or nitrogen, that diffuses into the SiO2 matrix. As a result, the surface defects on Si-NCs can be better passivated, and consequently, the PL of the system is intensified. We have selected different atmospheres (air, H2/N2 and Ar) to study the relevance of these annealing gases on the final PL from Si-NCs after metal ion implantation. Studies of PL and time-resolved PL indicate that passivation process of surface defects on Si-NCs is more effective when it is assisted by ion metal implantation.
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spelling doaj-art-2e3bda6815bf4474bfdb0dafc574928c2025-02-03T05:46:25ZengWileyJournal of Nanotechnology1687-95031687-95112013-01-01201310.1155/2013/736478736478Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion ImplantationJhovani Bornacelli0Jorge Alejandro Reyes Esqueda1Luis Rodríguez Fernández2Alicia Oliver3Instituto de Física, Universidad Nacional Autónoma de México, 04510 México, DF, MexicoInstituto de Física, Universidad Nacional Autónoma de México, 04510 México, DF, MexicoInstituto de Física, Universidad Nacional Autónoma de México, 04510 México, DF, MexicoInstituto de Física, Universidad Nacional Autónoma de México, 04510 México, DF, MexicoWe studied the photoluminescence (PL) of Si nanocrystals (Si-NCs) embedded in SiO2 obtained by ion implantation at MeV energy. The Si-NCs are formed at high depth (1-2 μm) inside the SiO2 achieving a robust and better protected system. After metal ion implantation (Ag or Au), and a subsequent thermal annealing at 600°C under hydrogen-containing atmosphere, the PL signal exhibits a noticeable increase. The ion metal implantation was done at energies such that its distribution inside the silica does not overlap with the previously implanted Si ion . Under proper annealing Ag or Au nanoparticles (NPs) could be nucleated, and the PL signal from Si-NCs could increase due to plasmonic interactions. However, the ion-metal-implantation-induced damage can enhance the amount of hydrogen, or nitrogen, that diffuses into the SiO2 matrix. As a result, the surface defects on Si-NCs can be better passivated, and consequently, the PL of the system is intensified. We have selected different atmospheres (air, H2/N2 and Ar) to study the relevance of these annealing gases on the final PL from Si-NCs after metal ion implantation. Studies of PL and time-resolved PL indicate that passivation process of surface defects on Si-NCs is more effective when it is assisted by ion metal implantation.http://dx.doi.org/10.1155/2013/736478
spellingShingle Jhovani Bornacelli
Jorge Alejandro Reyes Esqueda
Luis Rodríguez Fernández
Alicia Oliver
Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation
Journal of Nanotechnology
title Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation
title_full Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation
title_fullStr Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation
title_full_unstemmed Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation
title_short Improving Passivation Process of Si Nanocrystals Embedded in SiO2 Using Metal Ion Implantation
title_sort improving passivation process of si nanocrystals embedded in sio2 using metal ion implantation
url http://dx.doi.org/10.1155/2013/736478
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AT luisrodriguezfernandez improvingpassivationprocessofsinanocrystalsembeddedinsio2usingmetalionimplantation
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