Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications

With the rapid development of the power integrated circuit technology, polysilicon resistors have been widely used not only in traditional CMOS circuits, but also in the high voltage applications. However, there have been few detailed reports about the polysilicon resistors’ characteristics, like vo...

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Main Authors: Xiao-Yu Tang, Ke Dong
Format: Article
Language:English
Published: Wiley 2015-01-01
Series:Advances in Condensed Matter Physics
Online Access:http://dx.doi.org/10.1155/2015/423074
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author Xiao-Yu Tang
Ke Dong
author_facet Xiao-Yu Tang
Ke Dong
author_sort Xiao-Yu Tang
collection DOAJ
description With the rapid development of the power integrated circuit technology, polysilicon resistors have been widely used not only in traditional CMOS circuits, but also in the high voltage applications. However, there have been few detailed reports about the polysilicon resistors’ characteristics, like voltage and temperature coefficients and breakdown behaviors which are critical parameters of high voltage applications. In this study, we experimentally find that the resistance of the polysilicon resistor with a relatively low doping concentration shows negative voltage and temperature coefficients, while that of the polysilicon resistor with a high doping concentration has positive voltage and temperature coefficients. Moreover, from the experimental results of breakdown voltages of the polysilicon resistors, it could be deduced that the breakdown of polysilicon resistors is thermally rather than electrically induced. We also proposed to add an N-type well underneath the oxide to increase the breakdown voltage in the vertical direction when the substrate is P-type doped.
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institution Kabale University
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publishDate 2015-01-01
publisher Wiley
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series Advances in Condensed Matter Physics
spelling doaj-art-2dc705bfe59c48c5aa62dde2594734fd2025-02-03T05:53:57ZengWileyAdvances in Condensed Matter Physics1687-81081687-81242015-01-01201510.1155/2015/423074423074Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage ApplicationsXiao-Yu Tang0Ke Dong1School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaShanghai HuaHong NEC Electronics Company, Shanghai 201206, ChinaWith the rapid development of the power integrated circuit technology, polysilicon resistors have been widely used not only in traditional CMOS circuits, but also in the high voltage applications. However, there have been few detailed reports about the polysilicon resistors’ characteristics, like voltage and temperature coefficients and breakdown behaviors which are critical parameters of high voltage applications. In this study, we experimentally find that the resistance of the polysilicon resistor with a relatively low doping concentration shows negative voltage and temperature coefficients, while that of the polysilicon resistor with a high doping concentration has positive voltage and temperature coefficients. Moreover, from the experimental results of breakdown voltages of the polysilicon resistors, it could be deduced that the breakdown of polysilicon resistors is thermally rather than electrically induced. We also proposed to add an N-type well underneath the oxide to increase the breakdown voltage in the vertical direction when the substrate is P-type doped.http://dx.doi.org/10.1155/2015/423074
spellingShingle Xiao-Yu Tang
Ke Dong
Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
Advances in Condensed Matter Physics
title Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
title_full Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
title_fullStr Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
title_full_unstemmed Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
title_short Characteristics and Breakdown Behaviors of Polysilicon Resistors for High Voltage Applications
title_sort characteristics and breakdown behaviors of polysilicon resistors for high voltage applications
url http://dx.doi.org/10.1155/2015/423074
work_keys_str_mv AT xiaoyutang characteristicsandbreakdownbehaviorsofpolysiliconresistorsforhighvoltageapplications
AT kedong characteristicsandbreakdownbehaviorsofpolysiliconresistorsforhighvoltageapplications