Angle-Resolved Intensity of In-Axis/Off-Axis Polarized Micro-Raman Spectroscopy for Monocrystalline Silicon

Angle-Resolved Intensity of In-Axis/Off-Axis Polarized Micro-Raman Spectroscopy for Monocrystalline Silicon

Monocrystalline silicon (c-Si) is still an important material related to microelectronics/optoelectronics. The nondestructive measurement of the c-Si material and its microstructure is commonly required in scientific research and industrial applications, for which Raman spectroscopy is an indispensa...

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Bibliographic Details
Main Authors: Ying Chang, Saisai He, Mingyuan Sun, Aixia Xiao, Jiaxin Zhao, Lulu Ma, Wei Qiu
Format: Article
Language:English
Published: Wiley 2021-01-01
Series:Journal of Spectroscopy
Online Access:http://dx.doi.org/10.1155/2021/2860007
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