An Amorphous (Al<sub>0.12</sub>Ga<sub>0.88</sub>)<sub>2</sub>O<sub>3</sub> Deep Ultraviolet Photodetector

An Amorphous (Al<sub>0.12</sub>Ga<sub>0.88</sub>)<sub>2</sub>O<sub>3</sub> Deep Ultraviolet Photodetector

The authors report the deposition of an (Al<sub>x</sub>Ga<sub>1-x</sub>)<sub>2</sub>O<sub>3</sub> amorphous thin film on sapphire substrates by sputter deposition. An amorphous deep ultraviolet (UV) (Al<sub>0.12</sub>Ga<sub>0.88</s...

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Bibliographic Details
Main Authors:	Shu-Bai Liu, Shoou-Jinn Chang, Sheng-Po Chang, Chia-Hsun Chen
Format:	Article
Language:	English
Published:	IEEE 2020-01-01
Series:	IEEE Photonics Journal
Subjects:	<named-content xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" content-type="math" xlink:type="simple"> <inline-formula> <tex-math notation="LaTeX">$(\text{Al}_{\text{x}}\text{Ga}_{\text{1-x}})_{2}\text{O}_{3}$</tex-math> </inline-formula> </named-content> wide-bandgap material deep UV photodetector amorphous
Online Access:	https://ieeexplore.ieee.org/document/9115846/
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