Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam
Focused ion beams are an essential tool for cross-sectional material analysis at the microscale, preparing TEM samples, and much more. New plasma ion sources allow for higher beam currents and options to use unconventional ion species, resulting in increased versatility over a broader range of subst...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2021-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2021/8842777 |
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| _version_ | 1832555234724937728 |
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| author | Valerie Brogden Cameron Johnson Chad Rue Jeremy Graham Kurt Langworthy Stephen Golledge Ben McMorran |
| author_facet | Valerie Brogden Cameron Johnson Chad Rue Jeremy Graham Kurt Langworthy Stephen Golledge Ben McMorran |
| author_sort | Valerie Brogden |
| collection | DOAJ |
| description | Focused ion beams are an essential tool for cross-sectional material analysis at the microscale, preparing TEM samples, and much more. New plasma ion sources allow for higher beam currents and options to use unconventional ion species, resulting in increased versatility over a broader range of substrate materials. In this paper, we present the results of a four-material study from five different ion species at varying beam energies. This, of course, is a small sampling of the enormous variety of potential specimen and ion species combinations. We show that milling rates and texturing artifacts are quite varied. Therefore, there is a need for a systematic exploration of how different ion species mill different materials. There is so much to be done that it should be a community effort. Here, we present a publicly available automation script used to both measure sputter rates and characterize texturing artifacts as well as a collaborative database to which anyone may contribute. We also put forth some ideas for new applications of focused ion beams with novel ion species. |
| format | Article |
| id | doaj-art-21752082e1044b23a2cc5dd198205dae |
| institution | Kabale University |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2021-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-21752082e1044b23a2cc5dd198205dae2025-02-03T05:49:17ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422021-01-01202110.1155/2021/88427778842777Material Sputtering with a Multi-Ion Species Plasma Focused Ion BeamValerie Brogden0Cameron Johnson1Chad Rue2Jeremy Graham3Kurt Langworthy4Stephen Golledge5Ben McMorran6CAMCOR—University of Oregon, 1443 E13th Ave, Eugene, OR 97403, USADepartment of Physics, University of Oregon, 1274 University of Oregon, Eugene, OR 97403, USAThermoFisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USAThermoFisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USACAMCOR—University of Oregon, 1443 E13th Ave, Eugene, OR 97403, USACAMCOR—University of Oregon, 1443 E13th Ave, Eugene, OR 97403, USADepartment of Physics, University of Oregon, 1274 University of Oregon, Eugene, OR 97403, USAFocused ion beams are an essential tool for cross-sectional material analysis at the microscale, preparing TEM samples, and much more. New plasma ion sources allow for higher beam currents and options to use unconventional ion species, resulting in increased versatility over a broader range of substrate materials. In this paper, we present the results of a four-material study from five different ion species at varying beam energies. This, of course, is a small sampling of the enormous variety of potential specimen and ion species combinations. We show that milling rates and texturing artifacts are quite varied. Therefore, there is a need for a systematic exploration of how different ion species mill different materials. There is so much to be done that it should be a community effort. Here, we present a publicly available automation script used to both measure sputter rates and characterize texturing artifacts as well as a collaborative database to which anyone may contribute. We also put forth some ideas for new applications of focused ion beams with novel ion species.http://dx.doi.org/10.1155/2021/8842777 |
| spellingShingle | Valerie Brogden Cameron Johnson Chad Rue Jeremy Graham Kurt Langworthy Stephen Golledge Ben McMorran Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam Advances in Materials Science and Engineering |
| title | Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam |
| title_full | Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam |
| title_fullStr | Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam |
| title_full_unstemmed | Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam |
| title_short | Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam |
| title_sort | material sputtering with a multi ion species plasma focused ion beam |
| url | http://dx.doi.org/10.1155/2021/8842777 |
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