A Review of Optical Interferometry for High-Precision Length Measurement
Optical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/1/6 |
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| author | Guangyao Huang Can Cui Xiaoyang Lei Qixue Li Shuhua Yan Xinghui Li Guochao Wang |
| author_facet | Guangyao Huang Can Cui Xiaoyang Lei Qixue Li Shuhua Yan Xinghui Li Guochao Wang |
| author_sort | Guangyao Huang |
| collection | DOAJ |
| description | Optical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on grating and laser interferometries. For grating interferometry, systems configurations ranging from single-degree- to multi-degree-of-freedom are introduced. For laser interferometry, different measurement methods are presented and compared according to their respective characteristics, including homodyne, heterodyne, white light interferometry, etc. With the rise of the optical frequency comb, its unique spectral properties have greatly expanded the length measurement capabilities of laser interferometry, achieving an unprecedented leap in both measurement range and accuracy. With regard to discussion on enhancement of measurement precision, special attention is given to periodic nonlinear errors and phase demodulation methods. This review offers insights into current challenges and potential future directions for improving interferometric measurement systems, and also emphasizes the role of innovative technologies in advancing precision metrology technology. |
| format | Article |
| id | doaj-art-1e6352a5796e45ceabaa541b450f321b |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2024-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-1e6352a5796e45ceabaa541b450f321b2025-01-24T13:41:48ZengMDPI AGMicromachines2072-666X2024-12-01161610.3390/mi16010006A Review of Optical Interferometry for High-Precision Length MeasurementGuangyao Huang0Can Cui1Xiaoyang Lei2Qixue Li3Shuhua Yan4Xinghui Li5Guochao Wang6College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaTsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaOptical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on grating and laser interferometries. For grating interferometry, systems configurations ranging from single-degree- to multi-degree-of-freedom are introduced. For laser interferometry, different measurement methods are presented and compared according to their respective characteristics, including homodyne, heterodyne, white light interferometry, etc. With the rise of the optical frequency comb, its unique spectral properties have greatly expanded the length measurement capabilities of laser interferometry, achieving an unprecedented leap in both measurement range and accuracy. With regard to discussion on enhancement of measurement precision, special attention is given to periodic nonlinear errors and phase demodulation methods. This review offers insights into current challenges and potential future directions for improving interferometric measurement systems, and also emphasizes the role of innovative technologies in advancing precision metrology technology.https://www.mdpi.com/2072-666X/16/1/6laser interferometrygrating interferometryoptical frequency comblength measurement |
| spellingShingle | Guangyao Huang Can Cui Xiaoyang Lei Qixue Li Shuhua Yan Xinghui Li Guochao Wang A Review of Optical Interferometry for High-Precision Length Measurement Micromachines laser interferometry grating interferometry optical frequency comb length measurement |
| title | A Review of Optical Interferometry for High-Precision Length Measurement |
| title_full | A Review of Optical Interferometry for High-Precision Length Measurement |
| title_fullStr | A Review of Optical Interferometry for High-Precision Length Measurement |
| title_full_unstemmed | A Review of Optical Interferometry for High-Precision Length Measurement |
| title_short | A Review of Optical Interferometry for High-Precision Length Measurement |
| title_sort | review of optical interferometry for high precision length measurement |
| topic | laser interferometry grating interferometry optical frequency comb length measurement |
| url | https://www.mdpi.com/2072-666X/16/1/6 |
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