A method of monitoring the functional surfaces of the micro-opto-electro-mechanical systems’ components
The article presents a method of control of functional surfaces of MOEMS elements of special purpose, which can be used in the technology of production of such structures. This method of non-destructive testing allows to obtain information about the parameters of the topology of the surface of funct...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Ivan Kozhedub Kharkiv National Air Force University
2020-08-01
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| Series: | Наука і техніка Повітряних Сил Збройних Сил України |
| Subjects: | |
| Online Access: | https://journal-hnups.com.ua/index.php/nitps/article/view/320 |
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