Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments
Mass spectrometry measurements at high temperatures on amorphous Ta2O5, produced by Ion Beam Sputtering (IBS) and widely used for the high reflective coatings of the mirrors of gravitational-wave detectors, detect a release of argon around 1000 K. This process is thermally activated and the correspo...
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Elsevier
2025-01-01
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2405844025003895 |
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| author | A. Paolone M. Bazzan G. Favaro F. Borondics G. Nemeth F. Capitani S. Swaraj R. Belkhou R. Flammini J. Teillon C. Michel D. Hofman M. Granata |
| author_facet | A. Paolone M. Bazzan G. Favaro F. Borondics G. Nemeth F. Capitani S. Swaraj R. Belkhou R. Flammini J. Teillon C. Michel D. Hofman M. Granata |
| author_sort | A. Paolone |
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| description | Mass spectrometry measurements at high temperatures on amorphous Ta2O5, produced by Ion Beam Sputtering (IBS) and widely used for the high reflective coatings of the mirrors of gravitational-wave detectors, detect a release of argon around 1000 K. This process is thermally activated and the corresponding activation energy is 410 ± 60 kJ/mol. X-Ray Diffraction (XRD) measurements indicate that in the same range of temperature the crystallization of tantala takes place. Atomic Force Microscopy (AFM) experiments detect a reduction of the surface roughness in the crystalline phase; domains with typical dimensions of the order of few microns appear in the crystal. While the infrared reflectance and absorption properties measured by scanning near-field optical microscopy (SNOM) are extremely homogeneous in the amorphous state, they become dependent on the crystal domain at high temperatures. Moreover, an absorption band around 960 cm−1 appears only in samples heated in vacuum and not in specimen thermally treated in air.Photoemission electron microscopy (PEEM) experiments support the idea that this infrared absorption band is due to the formation of non-homogeneous and non-stoichiometric oxygen domains. |
| format | Article |
| id | doaj-art-1a622a14b5974fdb9090f8c7a7b0d6c1 |
| institution | Kabale University |
| issn | 2405-8440 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Heliyon |
| spelling | doaj-art-1a622a14b5974fdb9090f8c7a7b0d6c12025-02-02T05:28:47ZengElsevierHeliyon2405-84402025-01-01112e42009Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatmentsA. Paolone0M. Bazzan1G. Favaro2F. Borondics3G. Nemeth4F. Capitani5S. Swaraj6R. Belkhou7R. Flammini8J. Teillon9C. Michel10D. Hofman11M. Granata12Istituto dei Sistemi Complessi, Consiglio Nazionale delle Ricerche, Piazzale A. Moro 5, 00185, Roma, Italy; Sezione di Roma, Istituto Nazionale di Fisica Nucleare, Piazzale A. Moro 5, 00185, Roma, Italy; Corresponding author. Istituto dei Sistemi Complessi, Consiglio Nazionale delle Ricerche, Piazzale A. Moro 5, 00185, Roma, Italy.annalisa.paolone@roma1.infn.itDipartimento di Fisica e Astronomia, Università di Padova, Via F. Marzolo 8, 35131, Padova, Italy; Sezione di Padova, Istituto Nazionale di Fisica Nucleare, Via F. Marzolo 8, 35131, Padova, ItalyDipartimento di Fisica e Astronomia, Università di Padova, Via F. Marzolo 8, 35131, Padova, Italy; Sezione di Padova, Istituto Nazionale di Fisica Nucleare, Via F. Marzolo 8, 35131, Padova, ItalySOLEIL Synchrotron, L'Orme des Merisiers, RD 128, 91190, Saint Aubin, FranceSOLEIL Synchrotron, L'Orme des Merisiers, RD 128, 91190, Saint Aubin, FranceSOLEIL Synchrotron, L'Orme des Merisiers, RD 128, 91190, Saint Aubin, FranceSOLEIL Synchrotron, L'Orme des Merisiers, RD 128, 91190, Saint Aubin, FranceSOLEIL Synchrotron, L'Orme des Merisiers, RD 128, 91190, Saint Aubin, FranceIstituto di Struttura della Materia, Consiglio Nazionale delle Ricerche, Area di Ricerca di Tor Vergata, via del Fosso del Cavaliere 100, 00133, Roma, ItalyLaboratoire des Matériaux Avancés – IP2I, CNRS, Université de Lyon, 69622, Villeurbanne, FranceLaboratoire des Matériaux Avancés – IP2I, CNRS, Université de Lyon, 69622, Villeurbanne, FranceLaboratoire des Matériaux Avancés – IP2I, CNRS, Université de Lyon, 69622, Villeurbanne, FranceLaboratoire des Matériaux Avancés – IP2I, CNRS, Université de Lyon, 69622, Villeurbanne, FranceMass spectrometry measurements at high temperatures on amorphous Ta2O5, produced by Ion Beam Sputtering (IBS) and widely used for the high reflective coatings of the mirrors of gravitational-wave detectors, detect a release of argon around 1000 K. This process is thermally activated and the corresponding activation energy is 410 ± 60 kJ/mol. X-Ray Diffraction (XRD) measurements indicate that in the same range of temperature the crystallization of tantala takes place. Atomic Force Microscopy (AFM) experiments detect a reduction of the surface roughness in the crystalline phase; domains with typical dimensions of the order of few microns appear in the crystal. While the infrared reflectance and absorption properties measured by scanning near-field optical microscopy (SNOM) are extremely homogeneous in the amorphous state, they become dependent on the crystal domain at high temperatures. Moreover, an absorption band around 960 cm−1 appears only in samples heated in vacuum and not in specimen thermally treated in air.Photoemission electron microscopy (PEEM) experiments support the idea that this infrared absorption band is due to the formation of non-homogeneous and non-stoichiometric oxygen domains.http://www.sciencedirect.com/science/article/pii/S2405844025003895Amorphous materialsGravitational wave detectorsTantalaThermal treatmentsCrystallizationOptical properties |
| spellingShingle | A. Paolone M. Bazzan G. Favaro F. Borondics G. Nemeth F. Capitani S. Swaraj R. Belkhou R. Flammini J. Teillon C. Michel D. Hofman M. Granata Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments Heliyon Amorphous materials Gravitational wave detectors Tantala Thermal treatments Crystallization Optical properties |
| title | Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments |
| title_full | Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments |
| title_fullStr | Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments |
| title_full_unstemmed | Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments |
| title_short | Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments |
| title_sort | argon release crystallization morphological and optical changes of ion beam sputtered ta2o5 thin films during thermal treatments |
| topic | Amorphous materials Gravitational wave detectors Tantala Thermal treatments Crystallization Optical properties |
| url | http://www.sciencedirect.com/science/article/pii/S2405844025003895 |
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