MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation

Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized...

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Main Authors: Md Kamrul Hasan, Mustaqim Siddi Que Iskhandar, Steffen Liebermann, Shilby Baby, Jiahao Chen, Muhammad Hasnain Qasim, Dennis Löber, Roland Donatiello, Guilin Xu, Hartmut Hillmer
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Micromachines
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Online Access:https://www.mdpi.com/2072-666X/16/1/56
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author Md Kamrul Hasan
Mustaqim Siddi Que Iskhandar
Steffen Liebermann
Shilby Baby
Jiahao Chen
Muhammad Hasnain Qasim
Dennis Löber
Roland Donatiello
Guilin Xu
Hartmut Hillmer
author_facet Md Kamrul Hasan
Mustaqim Siddi Que Iskhandar
Steffen Liebermann
Shilby Baby
Jiahao Chen
Muhammad Hasnain Qasim
Dennis Löber
Roland Donatiello
Guilin Xu
Hartmut Hillmer
author_sort Md Kamrul Hasan
collection DOAJ
description Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving daylight steering into buildings. Secondly, 2D actuation means free movement of micromirrors via two angles—tilt (Φ) and torsion angle (θ)—while applying two corresponding voltages between the metallic micromirrors and corresponding FTO (fluorine-doped tin oxide) counters bottom electrode pads. In addition, a solution for a notorious problem in MEMS actuation is presented. Micromirror design modifications are necessary to eliminate possible crack formation on metallic structure due to stress concentration during the free movement of 2D actuatable micromirror arrays. The concept, design of micromirror arrays and bottom electrodes, as well as technological fabrication and experimental results are presented and discussed.
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institution Kabale University
issn 2072-666X
language English
publishDate 2024-12-01
publisher MDPI AG
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series Micromachines
spelling doaj-art-0fa005f915454e1580fd54860c643c8c2025-01-24T13:41:58ZengMDPI AGMicromachines2072-666X2024-12-011615610.3390/mi16010056MEMS Smart Glass with Larger Angular Tuning Range and 2D ActuationMd Kamrul Hasan0Mustaqim Siddi Que Iskhandar1Steffen Liebermann2Shilby Baby3Jiahao Chen4Muhammad Hasnain Qasim5Dennis Löber6Roland Donatiello7Guilin Xu8Hartmut Hillmer9Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyMillions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving daylight steering into buildings. Secondly, 2D actuation means free movement of micromirrors via two angles—tilt (Φ) and torsion angle (θ)—while applying two corresponding voltages between the metallic micromirrors and corresponding FTO (fluorine-doped tin oxide) counters bottom electrode pads. In addition, a solution for a notorious problem in MEMS actuation is presented. Micromirror design modifications are necessary to eliminate possible crack formation on metallic structure due to stress concentration during the free movement of 2D actuatable micromirror arrays. The concept, design of micromirror arrays and bottom electrodes, as well as technological fabrication and experimental results are presented and discussed.https://www.mdpi.com/2072-666X/16/1/56optical MEMSsmart glasselectrostatic actuationpull-indaylight steering2D actuation
spellingShingle Md Kamrul Hasan
Mustaqim Siddi Que Iskhandar
Steffen Liebermann
Shilby Baby
Jiahao Chen
Muhammad Hasnain Qasim
Dennis Löber
Roland Donatiello
Guilin Xu
Hartmut Hillmer
MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
Micromachines
optical MEMS
smart glass
electrostatic actuation
pull-in
daylight steering
2D actuation
title MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
title_full MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
title_fullStr MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
title_full_unstemmed MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
title_short MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
title_sort mems smart glass with larger angular tuning range and 2d actuation
topic optical MEMS
smart glass
electrostatic actuation
pull-in
daylight steering
2D actuation
url https://www.mdpi.com/2072-666X/16/1/56
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