Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect
Evaluation of squeezed film air damping is critical in the design and control of dynamic MEMS devices. The published squeezed film air damping models are generally derived from the analytical solutions of Reynolds equation or its other modified forms under the supposition of trivial pressure boundar...
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | Journal of Applied Mathematics |
| Online Access: | http://dx.doi.org/10.1155/2014/192891 |
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| author | Cheng Bai Jin Huang |
| author_facet | Cheng Bai Jin Huang |
| author_sort | Cheng Bai |
| collection | DOAJ |
| description | Evaluation of squeezed film air damping is critical in the design and control of dynamic MEMS devices. The published squeezed film air damping models are generally derived from the analytical solutions of Reynolds equation or its other modified forms under the supposition of trivial pressure boundary conditions on the peripheral borders. These treatments ignoring the border effect can not give faithful result for structure with smaller air venting gap or the double-gimbaled structure in which the inner frame and outer one affect the air venting. In this paper, we use Green’s function to solve the nonlinear Reynolds equation with inhomogeneous boundary conditions. For two typical normal motion cases of parallel plate, the analytical models of squeeze film damping force with border effect are established. The viscous and inertial losses with real values and image values acoustic impedance are all included in the model. These models reduced the time consumption while giving satisfactory result. Without multifield coupling analysis, the estimation of the dynamic behavior of MEMS device is also allowed, and the simulation of the system performance is more convenient. |
| format | Article |
| id | doaj-art-0e2ac38f2df64d4a8a4665494c4c2da9 |
| institution | Kabale University |
| issn | 1110-757X 1687-0042 |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Journal of Applied Mathematics |
| spelling | doaj-art-0e2ac38f2df64d4a8a4665494c4c2da92025-02-03T00:59:04ZengWileyJournal of Applied Mathematics1110-757X1687-00422014-01-01201410.1155/2014/192891192891Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border EffectCheng Bai0Jin Huang1Research Institute on Mechatronics, Xidian University, Xi’an 710071, ChinaResearch Institute on Mechatronics, Xidian University, Xi’an 710071, ChinaEvaluation of squeezed film air damping is critical in the design and control of dynamic MEMS devices. The published squeezed film air damping models are generally derived from the analytical solutions of Reynolds equation or its other modified forms under the supposition of trivial pressure boundary conditions on the peripheral borders. These treatments ignoring the border effect can not give faithful result for structure with smaller air venting gap or the double-gimbaled structure in which the inner frame and outer one affect the air venting. In this paper, we use Green’s function to solve the nonlinear Reynolds equation with inhomogeneous boundary conditions. For two typical normal motion cases of parallel plate, the analytical models of squeeze film damping force with border effect are established. The viscous and inertial losses with real values and image values acoustic impedance are all included in the model. These models reduced the time consumption while giving satisfactory result. Without multifield coupling analysis, the estimation of the dynamic behavior of MEMS device is also allowed, and the simulation of the system performance is more convenient.http://dx.doi.org/10.1155/2014/192891 |
| spellingShingle | Cheng Bai Jin Huang Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect Journal of Applied Mathematics |
| title | Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect |
| title_full | Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect |
| title_fullStr | Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect |
| title_full_unstemmed | Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect |
| title_short | Improving the Validity of Squeeze Film Air-Damping Model of MEMS Devices with Border Effect |
| title_sort | improving the validity of squeeze film air damping model of mems devices with border effect |
| url | http://dx.doi.org/10.1155/2014/192891 |
| work_keys_str_mv | AT chengbai improvingthevalidityofsqueezefilmairdampingmodelofmemsdeviceswithbordereffect AT jinhuang improvingthevalidityofsqueezefilmairdampingmodelofmemsdeviceswithbordereffect |