TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
Photocatalytic TiO2 films on glass and quartz plates were obtained by the chemical vapour deposition using Ti(dpm)2(Opri)2 complex compound (CC-CVD method) in a standard vacuum apparatus at 1.2–2.0 × 10-4 mbar. The substrate temperature was stabilised in the range of 450–600 ∘C. The growth rate vari...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2003-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/S1110662X03000205 |
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