TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties

Photocatalytic TiO2 films on glass and quartz plates were obtained by the chemical vapour deposition using Ti(dpm)2(Opri)2 complex compound (CC-CVD method) in a standard vacuum apparatus at 1.2–2.0 × 10-4 mbar. The substrate temperature was stabilised in the range of 450–600 ∘C. The growth rate vari...

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Main Authors: V. G. Besserguenev, R. J.F. Pereira, M. C. Mateus, I. V. Khmelinskii, R. C. Nicula, E. Burkel
Format: Article
Language:English
Published: Wiley 2003-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/S1110662X03000205
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author V. G. Besserguenev
R. J.F. Pereira
M. C. Mateus
I. V. Khmelinskii
R. C. Nicula
E. Burkel
author_facet V. G. Besserguenev
R. J.F. Pereira
M. C. Mateus
I. V. Khmelinskii
R. C. Nicula
E. Burkel
author_sort V. G. Besserguenev
collection DOAJ
description Photocatalytic TiO2 films on glass and quartz plates were obtained by the chemical vapour deposition using Ti(dpm)2(Opri)2 complex compound (CC-CVD method) in a standard vacuum apparatus at 1.2–2.0 × 10-4 mbar. The substrate temperature was stabilised in the range of 450–600 ∘C. The growth rate varied from several nanometres to several dozen of nanometres per minute. Structural information on TiO2 thin films was obtained from synchrotron radiation experiments. High-resolution grazing incidence X-ray diffraction (GIXRD) experiments were performed at the high-resolution powder diffractometer at the DESY/HASYLAB beamline B2 (Hamburg, Germany). Thin films deposited on either single-crystal Si wafers or on amorphous quartz substrates were analysed. The photocatalytic activity of the TiO2 thin films was studied using a photocatalytic reactor. The fungicide Fenarimol was chosen as chemical indicator and its degradation kinetics was followed by High-Performance Liquid Chromatography (HPLC).
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series International Journal of Photoenergy
spelling doaj-art-09b6ed80914241c1a581062e8c4dfdf62025-02-03T06:01:37ZengWileyInternational Journal of Photoenergy1110-662X2003-01-01529910510.1155/S1110662X03000205TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic propertiesV. G. Besserguenev0R. J.F. Pereira1M. C. Mateus2I. V. Khmelinskii3R. C. Nicula4E. Burkel5Algarve University, Campus de Gambelas, Faro 8000-117, PortugalAlgarve University, Campus de Gambelas, Faro 8000-117, PortugalAlgarve University, Campus de Gambelas, Faro 8000-117, PortugalAlgarve University, Campus de Gambelas, Faro 8000-117, PortugalUniversity of Rostock, FB Physik, August-Bebel-Str. 55, Rostock 18055, GermanyUniversity of Rostock, FB Physik, August-Bebel-Str. 55, Rostock 18055, GermanyPhotocatalytic TiO2 films on glass and quartz plates were obtained by the chemical vapour deposition using Ti(dpm)2(Opri)2 complex compound (CC-CVD method) in a standard vacuum apparatus at 1.2–2.0 × 10-4 mbar. The substrate temperature was stabilised in the range of 450–600 ∘C. The growth rate varied from several nanometres to several dozen of nanometres per minute. Structural information on TiO2 thin films was obtained from synchrotron radiation experiments. High-resolution grazing incidence X-ray diffraction (GIXRD) experiments were performed at the high-resolution powder diffractometer at the DESY/HASYLAB beamline B2 (Hamburg, Germany). Thin films deposited on either single-crystal Si wafers or on amorphous quartz substrates were analysed. The photocatalytic activity of the TiO2 thin films was studied using a photocatalytic reactor. The fungicide Fenarimol was chosen as chemical indicator and its degradation kinetics was followed by High-Performance Liquid Chromatography (HPLC).http://dx.doi.org/10.1155/S1110662X03000205
spellingShingle V. G. Besserguenev
R. J.F. Pereira
M. C. Mateus
I. V. Khmelinskii
R. C. Nicula
E. Burkel
TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
International Journal of Photoenergy
title TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
title_full TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
title_fullStr TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
title_full_unstemmed TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
title_short TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties
title_sort tio2 thin film synthesis from complex precursors by cvd its physical and photocatalytic properties
url http://dx.doi.org/10.1155/S1110662X03000205
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