Enhanced Temperature Control Method Using ANFIS with FPGA
Temperature control in etching process is important for semiconductor manufacturing technology. However, pressure variations in vacuum chamber results in a change in temperature, worsening the accuracy of the temperature of the wafer and the speed and quality of the etching process. This work develo...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | The Scientific World Journal |
| Online Access: | http://dx.doi.org/10.1155/2014/239261 |
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| _version_ | 1832562784259276800 |
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| author | Chiung-Wei Huang Shing-Tai Pan Jun-Tin Zhou Cheng-Yuan Chang |
| author_facet | Chiung-Wei Huang Shing-Tai Pan Jun-Tin Zhou Cheng-Yuan Chang |
| author_sort | Chiung-Wei Huang |
| collection | DOAJ |
| description | Temperature control in etching process is important for semiconductor manufacturing technology. However, pressure variations in vacuum chamber results in a change in temperature, worsening the accuracy of the temperature of the wafer and the speed and quality of the etching process. This work develops an adaptive network-based fuzzy inference system (ANFIS) using a field-programmable gate array (FPGA) to improve the effectiveness. The proposed method adjusts every membership function to keep the temperature in the chamber stable. The improvement of the proposed algorithm is confirmed using a medium vacuum (MV) inductively-coupled plasma- (ICP-) type etcher. |
| format | Article |
| id | doaj-art-06e8ff3f40df453fac18641f7233eabc |
| institution | Kabale University |
| issn | 2356-6140 1537-744X |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | The Scientific World Journal |
| spelling | doaj-art-06e8ff3f40df453fac18641f7233eabc2025-02-03T01:21:42ZengWileyThe Scientific World Journal2356-61401537-744X2014-01-01201410.1155/2014/239261239261Enhanced Temperature Control Method Using ANFIS with FPGAChiung-Wei Huang0Shing-Tai Pan1Jun-Tin Zhou2Cheng-Yuan Chang3Department of Electronic Engineering, Chien Hsin University of Science and Technology, Jhongli 320, TaiwanDepartment of Computer Science and Information Engineering, National University of Kaohsiung, Kaohsiung 811, TaiwanDepartment of Electrical Engineering, Chung Yuan Christian University, Jhongli 320, TaiwanDepartment of Electrical Engineering, Chung Yuan Christian University, Jhongli 320, TaiwanTemperature control in etching process is important for semiconductor manufacturing technology. However, pressure variations in vacuum chamber results in a change in temperature, worsening the accuracy of the temperature of the wafer and the speed and quality of the etching process. This work develops an adaptive network-based fuzzy inference system (ANFIS) using a field-programmable gate array (FPGA) to improve the effectiveness. The proposed method adjusts every membership function to keep the temperature in the chamber stable. The improvement of the proposed algorithm is confirmed using a medium vacuum (MV) inductively-coupled plasma- (ICP-) type etcher.http://dx.doi.org/10.1155/2014/239261 |
| spellingShingle | Chiung-Wei Huang Shing-Tai Pan Jun-Tin Zhou Cheng-Yuan Chang Enhanced Temperature Control Method Using ANFIS with FPGA The Scientific World Journal |
| title | Enhanced Temperature Control Method Using ANFIS with FPGA |
| title_full | Enhanced Temperature Control Method Using ANFIS with FPGA |
| title_fullStr | Enhanced Temperature Control Method Using ANFIS with FPGA |
| title_full_unstemmed | Enhanced Temperature Control Method Using ANFIS with FPGA |
| title_short | Enhanced Temperature Control Method Using ANFIS with FPGA |
| title_sort | enhanced temperature control method using anfis with fpga |
| url | http://dx.doi.org/10.1155/2014/239261 |
| work_keys_str_mv | AT chiungweihuang enhancedtemperaturecontrolmethodusinganfiswithfpga AT shingtaipan enhancedtemperaturecontrolmethodusinganfiswithfpga AT juntinzhou enhancedtemperaturecontrolmethodusinganfiswithfpga AT chengyuanchang enhancedtemperaturecontrolmethodusinganfiswithfpga |