DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA
Various modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of laser-plasma and magnetron methods of coatings dep...
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| Format: | Article |
| Language: | English |
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Belarusian National Technical University
2015-04-01
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| Series: | Приборы и методы измерений |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/112 |
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| _version_ | 1832557279470157824 |
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| author | A. P. Burmakov V. A. Zaikov F. F. Komarov O. R. Lyudchik D. A. Saladukha |
| author_facet | A. P. Burmakov V. A. Zaikov F. F. Komarov O. R. Lyudchik D. A. Saladukha |
| author_sort | A. P. Burmakov |
| collection | DOAJ |
| description | Various modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of laser-plasma and magnetron methods of coatings deposition. |
| format | Article |
| id | doaj-art-031c124fd2514e8eae993251fcee69db |
| institution | Kabale University |
| issn | 2220-9506 2414-0473 |
| language | English |
| publishDate | 2015-04-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Приборы и методы измерений |
| spelling | doaj-art-031c124fd2514e8eae993251fcee69db2025-02-03T05:16:56ZengBelarusian National Technical UniversityПриборы и методы измерений2220-95062414-04732015-04-01013740106DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMAA. P. Burmakov0V. A. Zaikov1F. F. Komarov2O. R. Lyudchik3D. A. Saladukha4Белорусский государственный университетБелорусский государственный университетБелорусский государственный университетБелорусский государственный университетБелорусский государственный университетVarious modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of laser-plasma and magnetron methods of coatings deposition.https://pimi.bntu.by/jour/article/view/112magnetrondepositionlaserplasmaspectroscopy |
| spellingShingle | A. P. Burmakov V. A. Zaikov F. F. Komarov O. R. Lyudchik D. A. Saladukha DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA Приборы и методы измерений magnetron deposition laser plasma spectroscopy |
| title | DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA |
| title_full | DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA |
| title_fullStr | DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA |
| title_full_unstemmed | DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA |
| title_short | DEVICE FOR INVESTIGATION OF MAGNETRON AND PULSED-LASER PLASMA |
| title_sort | device for investigation of magnetron and pulsed laser plasma |
| topic | magnetron deposition laser plasma spectroscopy |
| url | https://pimi.bntu.by/jour/article/view/112 |
| work_keys_str_mv | AT apburmakov deviceforinvestigationofmagnetronandpulsedlaserplasma AT vazaikov deviceforinvestigationofmagnetronandpulsedlaserplasma AT ffkomarov deviceforinvestigationofmagnetronandpulsedlaserplasma AT orlyudchik deviceforinvestigationofmagnetronandpulsedlaserplasma AT dasaladukha deviceforinvestigationofmagnetronandpulsedlaserplasma |