Control of a quasi-static MEMS Mirror for raster scanning projection applications
The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for imp...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2024-12-01
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| Series: | International Journal of Optomechatronics |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/15599612.2024.2386991 |
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