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    Effect of Rapid Thermal Annealing on the Characteristics of Micro Zn-Doped Ga<sub>2</sub>O<sub>3</sub> Films by Using Mixed Atomic Layer Deposition

    Effect of Rapid Thermal Annealing on the Characteristics of Micro Zn-Doped Ga<sub>2</sub>O<sub>3</sub> Films by Using Mixed Atomic Layer Deposition by Jiajia Tao, Xishun Jiang, Aijie Fan, Xianyu Hu, Ping Wang, Zuoru Dong, Yingjie Wu

    Published 2025-03-01
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