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    Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors

    Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors by Yameng Shan, Lei Qian, Kaixuan He, Bo Chen, Kewei Wang, Wenchao Li, Wenjiang Shen

    Published 2024-11-01
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