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  1. 1
    Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films

    Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films by Zhonghao Liu, Yuting Guo, Shang Li, Yanxiang Chen, Ke Deng, Hulin Liu, Shuren Guo, Xuanpu Dong, Huatang Cao

    Published 2025-01-01
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  2. 2
    Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films

    Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films by Ke Deng, Zhonghao Liu, Hulin Liu, Yanxiang Chen, Shang Li, Shuren Guo, Boyu Xiu, Xuanpu Dong, Huatang Cao

    Published 2025-01-01
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