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    Temperature Influence on the Properties of Thin Si3N4 Films

    Temperature Influence on the Properties of Thin Si3N4 Films by V.S. Zakhvalinskii, P.V. Abakumov, A.P. Kuzmenko, A.S. Chekadanov, E.A. Piljuk, V.G. Rodriguez, I.J. Goncharov, S.V. Taran

    Published 2015-12-01
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