Showing 1 - 1 results of 1 for search 'V. Ya. Malakhov', query time: 0.01s Refine Results
  1. 1
    Optical Properties of PECVD Si-C-N Films

    Optical Properties of PECVD Si-C-N Films by A.O. Kozak, V.I. Ivashchenko, O.K. Porada, L.A. Ivashchenko, V. Ya. Malakhov, T.V. Tomila

    Published 2015-10-01
    Get full text
    Article
    Save to List
    Saved in:

Search Tools: