Reflective Absorption IR Fourier-Spectroscopy of Photoresistive Films on Silicon by D. I. Brinkevich, E. V. Grinyuk, V. S. Prosolovich, S. D. Brinkevich, V. V. Kolos, O. A. Zubova

Get full text

MEASUREMENT OF MICROHARDNESS OF PHOTORESIST FILMS ON SILICON BY THE SCRATCHING METHOD by D. I. Brinkevich, V. S. Prosolovich, Yu. N. Yankovski, S. A. Vabishchevich, N. V. Vabishchevich, V. E. Gaishun

Get full text

QUALITY ANALYSIS OF THE GATE DIELECTRIC OF THE MOS-STRUCTURES BY CAPACITY-VOLTAGE CHARACTERISTICS by V. B. Odzhaev, A. N. Pyatlitski, V. S. Prosolovich, V. A. Filipenya, S. V. Shvedau, V. V. Chernyi, V. Yu. Yavid, Yu. N. Yankouski

Get full text