Showing 1 - 3 results of 3 for search 'Ulrich Vogt', query time: 0.01s Refine Results
  1. 1
    Lift-off free catalyst for metal assisted chemical etching of nanostructured silicon zone plates in vapour phase

    Lift-off free catalyst for metal assisted chemical etching of nanostructured silicon zone plates in vapour phase by Hanna Ohlin, Bryan Benz, Lucia Romano, Ulrich Vogt

    Published 2025-01-01
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  2. 2
    Corrigendum to “Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers” [Micro and Nano Engineering Volume 16, August 2022, 100141]

    Corrigendum to “Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers” [Micro and Nano Engineering Volume 16, August 2022, 100141... by Mattias Åstrand, Thomas Frisk, Hanna Ohlin, Ulrich Vogt

    Published 2025-03-01
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  3. 3
    Multi-beam multi-slice X-ray ptychography

    Multi-beam multi-slice X-ray ptychography by Mattias Åstrand, Ulrich Vogt, Runqing Yang, Pablo Villanueva Perez, Tang Li, Mikhail Lyubomirskiy, Maik Kahnt

    Published 2025-03-01
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