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    Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

    Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility by Shinji Yasui, Tadashi Shojo, Goichi Inoue, Kunihiko Koike, Akihiro Takeuchi, Yoshio Iwasa

    Published 2012-01-01
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