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    Thin film sputter-deposition of AlN crystals in oxygenated chamber: a pilot study

    Thin film sputter-deposition of AlN crystals in oxygenated chamber: a pilot study by Muhammad Izzuddin Abd Samad, Syazwani Izrah Badrudin, Marwan Mansor, Nafarizal Nayan, Ahmad Shuhaimi Abu Bakar, Mohd Zamri Yusop, Rhonira Latif

    Published 2025-01-01
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