Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays by Jiahao Chen, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md. Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Löber, Shujie Liu, Roland Donatiello, Steffen Liebermann, Guilin Xu, Hartmut Hillmer

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