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Soshun Doko
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Effect of H2 heat treatment on the switching behavior of ferroelectric AlScN capacitors
by
Nana Sun
,
Kazuki Okamoto
,
Shinnosuke Yasuoka
,
Soshun Doko
,
Naoko Matsui
,
Toshikazu Irisawa
,
Koji Tsunekawa
,
Haidong Lu
,
Alexei Gruverman
,
Hiroshi Funakubo
Published 2025-05-01
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