Influence of line edge roughness in optical critical dimension metrology by Siefke Thomas

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Resolution enhancement methods in optical microscopy for dimensional optical metrology by Nouri Mohammad, Olivero Paolo, Kroker Stefanie, Käseberg Tim, Ruo-Berchera Ivano, Bodermann Bernd, Tyagi Himanshu, Roy Deb, Mukherjee Deshabrato, Siefke Thomas, Hansen Poul Erik, Rømer Astrid Tranum, Valtr Miroslav, Aprà Pietro, Petrik Peter

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