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    A Process Optimization Method of the Mini-LOCOS Field Plate Profile for Improving Electrical Characteristics of LDMOS Device

    A Process Optimization Method of the Mini-LOCOS Field Plate Profile for Improving Electrical Characteristics of LDMOS Device by Shaoxin Yu, Weiheng Shao, Pei-Xiong Gao, Xiang Li, Rongsheng Chen, Bin Zhao

    Published 2023-01-01
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