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  1. 1
    TEM Observation of the Dislocations Nucleated from Cracks inside Lightly or Heavily Doped Czochralski Silicon Wafers

    TEM Observation of the Dislocations Nucleated from Cracks inside Lightly or Heavily Doped Czochralski Silicon Wafers by Seiji Shiba, Koji Sueoka

    Published 2011-01-01
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  2. 2
    Systematic Investigation of Gettering Effects on 4th Row Element Impurities in Si by Dopant Atoms

    Systematic Investigation of Gettering Effects on 4th Row Element Impurities in Si by Dopant Atoms by Koji Sueoka, Ken Kamimura, Seiji Shiba

    Published 2009-01-01
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