Showing 1 - 2 results of 2 for search 'S. F. Sianko', query time: 0.01s Refine Results
  1. 1
    ESTIMATION OF TOPOGRAPHIC DEFECTS DIMENSIONS OF SEMICONDUCTOR SILICON STRUCTURES

    ESTIMATION OF TOPOGRAPHIC DEFECTS DIMENSIONS OF SEMICONDUCTOR SILICON STRUCTURES by S. F. Sianko, V. A. Zelenin

    Published 2018-03-01
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  2. 2
    Quantitative characterization of topographic defects of semiconductor silicon wafers

    Quantitative characterization of topographic defects of semiconductor silicon wafers by S. F. Sianko, A. S. Sianko, V. A. Zelenin

    Published 2019-06-01
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