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    Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity

    Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity by Sanjeev Vishal Kota, Anil Thilsted, Daniel Trimarco, Jesper Yue Pan, Ole Hansen, Jörg Hübner, Rafael Taboryski, Henri Jansen

    Published 2025-01-01
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