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    Comparison of chip size effects of thin film GaN-based μLEDs fabricated by plasma etching and ion implantation processing

    Comparison of chip size effects of thin film GaN-based μLEDs fabricated by plasma etching and ion implantation processing by Tsung-Chih Wan, Ping-Hsun Tsai, Hao-Wu Lin, Chien-Chung Lin, Dong-Sing Wuu, Hiroshi Amano, Tae-Yeon Seong, Ray-Hua Horng

    Published 2025-06-01
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