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    Silicon Micromachining for High Performance Passive Structures at W Band

    Silicon Micromachining for High Performance Passive Structures at W Band by B. Guillon, K. Grenier, T. Parra, P. Pons, D. Cros, P. Blondy, J. Graffeuil, J. L. Cazaux, R. Plana

    Published 2002-01-01
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