Showing 1 - 2 results of 2 for search 'O. I. Tsikhan', query time: 0.01s Refine Results
  1. 1
    Study of the influence of ozone-air mixture supply conditions on the process of the photoresist removal from the silicon wafer surface

    Study of the influence of ozone-air mixture supply conditions on the process of the photoresist removal from the silicon wafer surface by O. I. Tsikhan, S. I. Madveika, S. V. Bordusau, A. L. Barakhoev, P. V. Kamlach

    Published 2020-10-01
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  2. 2
    Research stand for microplasma surface treatment of materials at atmospheric pressure

    Research stand for microplasma surface treatment of materials at atmospheric pressure by S. V. Bordusau, S. I. Madveika, A. L. Barakhoyeu, O. I. Tsikhan, A. A. Maiseyeu

    Published 2021-10-01
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