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Mike Kines
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In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance
by
Jen-Chieh Hsueh
,
Mike Kines
,
Yousri Ahmed Tantawy
,
Dale Shane Smith
,
Jamin McCue
,
Brian Dupaix
,
Vipul J. Patel
,
Waleed Khalil
Published 2025-05-01
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