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    Highly Sensitive Phased Array Probes based on Capacitive Micromachined Ultrasonic Transducers

    Highly Sensitive Phased Array Probes based on Capacitive Micromachined Ultrasonic Transducers by Uwe Voelz, Marco Kircher, Sandro G. KOCH, Marcel Krenkel

    Published 2024-11-01
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