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    Surface patterning of wide-gap semiconducting β-Ga2O3 thin films by area selective crystallization via room-temperature excimer laser annealing and low-toxic wet etching processes

    Surface patterning of wide-gap semiconducting β-Ga2O3 thin films by area selective crystallization via room-temperature excimer laser annealing and low-toxic wet etching processes by Daishi Shiojiri, Ryoya Kai, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto

    Published 2025-01-01
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