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    A Novel <i>AlN</i>/<i>Sc</i><sub>0.2</sub><i>Al</i><sub>0.8</sub><i>N</i>-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone

    A Novel <i>AlN</i>/<i>Sc</i><sub>0.2</sub><i>Al</i><sub>0.8</sub><i>N</i>-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone by Fansheng Meng, Chaoshuai Zhang, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, Licheng Jia

    Published 2025-04-01
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