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  1. 1
    Piezoelectric Layer Transfer Process for MEMS

    Piezoelectric Layer Transfer Process for MEMS by Gwenael Le Rhun, Franklin Pavageau, Timothée Rotrou, Christel Dieppedale, Laurent Mollard

    Published 2024-03-01
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  2. 2
    Thermal Behavior of Biaxial Piezoelectric MEMS Scanner

    Thermal Behavior of Biaxial Piezoelectric MEMS Scanner by Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan

    Published 2024-06-01
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