Showing 1 - 2 results of 2 for search 'Kuan-Yu Ko', query time: 0.01s Refine Results
  1. 1
    Development of an innovative low-temperature PEALD process for stress-compensated TiO2 and SiO2 multilayer anti-reflective coatings

    Development of an innovative low-temperature PEALD process for stress-compensated TiO2 and SiO2 multilayer anti-reflective coatings by Duy Thanh Cu, Kuan-Yu Ko, Wen-Hao Cho, Chao-Te Lee, Meng-Chi Li, Chien-Cheng Kuo

    Published 2025-03-01
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  2. 2
    The effect of hydrogen ion bombardment on the capping layers of extreme ultraviolet mirrors

    The effect of hydrogen ion bombardment on the capping layers of extreme ultraviolet mirrors by Kuan-Wei Lu, Kuan-Yu Ko, Ai-Ling Shih, Duy Thanh Cu, Meng-Chi Li, Chien-Cheng Kuo

    Published 2025-01-01
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