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    High Mg activation with suppressed Mg diffusion during ultra-high-pressure annealing via sequential nitrogen-ion implantation in Mg-ion-implanted GaN

    High Mg activation with suppressed Mg diffusion during ultra-high-pressure annealing via sequential nitrogen-ion implantation in Mg-ion-implanted GaN by Kensuke Sumida, Keita Kataoka, Tetsuo Narita, Masahiro Horita, Tetsu Kachi, Jun Suda

    Published 2025-01-01
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