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Conductive filament formation in the failure of Hf0.5Zr0.5O2 ferroelectric capacitors by Matthew Webb, Tony Chiang, Megan K. Lenox, Jordan Gray, Tao Ma, Jon F. Ihlefeld, John T. Heron
Published 2025-01-01Get full text
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Effect of Precursor Purge Time on Plasma-Enhanced Atomic Layer Deposition-Prepared Ferroelectric Hf0.5Zr0.5O2 Phase and Performance by Yong Kyu Choi, Kristina Holsgrove, Andrea Watson, Benjamin L. Aronson, Megan K. Lenox, Liron Shvilberg, Chuanzhen Zhou, Shelby S. Fields, Shihao Wang, Stephen J. McDonnell, Amit Kumar, Jon F. Ihlefeld
Published 2025-05-01Get full text
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