Direct observation of 3D nitrogen distribution in silicon-based dielectrics using atom probe tomography by Byeong-Gyu Chae, Jeong Yeon Won, Young Sik Shin, Dong Jin Yun, Jae min Ahn, Seon Tae Park, Ki-bum Lee, Hokyun An, Mina Seol, I-Jun Ro, Se-Ho Kim, Chunhyung Chung, Eunha Lee

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