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Hyo-Chang Lee
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Hyo-Chang Lee
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1
Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing Using Tri-CycleGAN
by
Minji Kang
,
Sung Kyu Jang
,
Jihun Kim
,
Seongho Kim
,
Changmin Kim
,
Hyo-Chang Lee
,
Wooseok Kang
,
Min Sup Choi
,
Hyeongkeun Kim
,
Hyeong-U Kim
Published 2024-11-01
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2
Correction to “Evaluation of H2 Plasma‐Induced Damage in Materials for EUV Lithography”
by
Eun‐Seok Choe
,
Seungwook Choi
,
Ansoon Kim
,
Kwan‐Yong Kim
,
Hee‐Jung Yeom
,
Min Young Yoon
,
Seongwan Hong
,
Dong‐Wook Kim
,
Jung‐Hyung Kim
,
Hyo‐Chang Lee
Published 2025-04-01
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